Pfeiffer Vacuum EVR 116 Gas Dosing Valve

Pfeiffer Vacuum EVR 116 Gas Dosing Valve

Dosing Valve
Model: EVR 116

Actuator:     no
Ambient temperature:     5-40 °C
Bakeout temperature: actuator     60 °C
Bakeout temperature: housing     80 °C
Closing / opening time: < 3 / 4 s
Control:     RVC 300 or IF 200
Control voltage:     0-10 V DC
Dosing sleeve:     Fluorplastomer
Flange (in):     DN 16 ISO-KF
Flange (out):     DN 16 ISO-KF
Gas flow max. controllable:     1.25 · 103 mbar l/s
Gas flow min. controllable:     5 · 10-6 mbar l/s
Housing:     no
Housing/needle/filter:     Stainless steel
Pressure max:     2.5 bar
Pressure min:     1 · 10-8 mbar
Seal:     FPM
Supply:    no
Supply: Power consumption max.     12 VA
Supply: Voltage     24 V DC
Tightness:     1 · 10-9 mbar l/s
Weight:     0.5 kg

Intended Use
The EVR 116 Control Valve is used together with a control unit for controlling the pressure in a vacuum system, either with a variable gas flow (up-stream control) or with a variable conductance (down-stream control).
It must not be used with liquid gases.

Functional Principle
The Control Valve with integrated motor drive electronics, which transforms the control signal into a defined valve position, can be controlled 
• with analog voltage,
• via integrated interface